Page 25 - REC :: M.E. CS Curriculum and Syllabus - R2019

PROFESSIONAL ELECTIVE -II

Subject Code Subject Name Category L T P C
CU19P21 RF MEMS PE 3 0 0 3

Objectives:
 To learn the basic building blocks of RF electronics and Its improved feature
 To acquire knowledge on RF switches and various passive components.
 To understand the concepts of RF filters and oscillators
 To study the basics of MEMS phase shifters
 To acquire knowledge on reliability and packaging.

UNIT-I INTRODUCTION OF RF MEMS 9
Basic building blocks of RF system, RF MEMS Features- High Frequency effects, Introduction to Microwave
Engineering, RF transmission lines: theory, Types of transmission lines, Impedance matching, S – parameters and
ABCD Parameters, Smith Chart for Impedance matching.
UNIT-II SWITCHES AND PASSIVE COMPONENTS 9
Introduction, basic design, case studies, Micromachined passive components, theory, features, tunable capacitors,
inductors, RF modeling of passive RF MEMS components.
MEM switches: shunt MEM switch, low voltage hinged MEM switch, push-pull series switch, folded beam springs
suspension series switch
UNIT-III FILTERS AND OSCILLATORS 9
Design concepts, Mechanical filters: design approaches, MEMS RF filters; Microwave filters: SAW and BAW filters,
Micro machined tunable filter, RF MEMS Oscillators – fundamentals, Micromachined cavity oscillator, MEMS based
voltage controlled oscillator.
UNIT-IV PHASE SHIFTERS 9
Introduction, RF MEMS Phase shifters, Design of switched delay line phase shifters Antennas: Introduction,
Microstrip antennas, Micromachined antennas, Micromachined Transmission lines and components for sub millimeter
wave applications, Reconfigurable antennas
UNIT-V RELIABILITY AND PACKAGING 9
MEMS packaging, RF MEMS packaging, Wafer level packaging.
Total Contact Hours : 45

Course Outcomes:
On completion of the course, students will be able to
 Describe various parameters of RF signals and their interpretation in MEMS.
 Design passive RF MEMS components and switches
 Design of RF MEMS oscillators and filters
 Design and fabricate antennas using MEMS technology
 Outline the significance of packaging for improved performance.

Reference Books(s) / Web links:
1 Gabriel M. Rebeiz, RfMems: Theory, Design, And Technology, Wiley.
2 Vijay K.Varadan, K.J. Vinoy, K.A. Jose., “RF MEMS and their Applications”, John Wiley and sons, LTD, 2002
3 Hector J. De Los Santos, “RF MEMS Circuit Design for Wireless Communications”, Artech House, 2002.
Stepan Lucyszyn, Advanced RF MEMS (The Cambridge RF and Microwave Engineering Series)" Cambridge
4
University Press, 2010, ISBN: 0521897718.