Page 63 - REC :: All Dept Open Electives

Piezoelectric sensing and actuation- piezoelectric material properties-quartz-PZT-PVDF–ZnO
application-inertial, Acoustic, tactile, flow-surface elastic waves magnetic actuation- Micro magnetic
actuation principle- deposition of magnetic materials-Design and fabrication of magnetic coil.

UNIT IV BULK AND SURFACE MICROMACHINING 9

Anisotropic wet etching, Dry etching of silicon, Deep reactive ion etching (DRIE), Isotropic wet etching,
Basic surface micromachining process- structural and sacrificial material, stiction and anti stiction
methods, Foundry process.

UNIT V APPLICATIONS OF MEMS 9

MEMS Sensors and their Applications-Acceleration, pressure, flow and tactile sensors, Optical MEMS-
passive MEMS, optical components-lenses-mirrors-Actuation for active optical MEMS, Biotechnology
and medicine- biochips for detection of hazardous chemical and biological agents, and microsystems for
high-throughput drug screening and selection , MEMS pressure sensors for monitoring blood pressure,
drug delivery and implantable devices.
TOTAL = 45 PERIODS
OUTCOMES:
Upon completion of the course students will

 Understand the advantages of MEMS
 Gain knowledge on properties of materials used MEMS technology
 Appreciate the principles behind MEMS sensors and actuators
 Get acquainted with micromachining processes
 Acquire knowledge in polymers used in MEMS and their applications

TEXT BOOKS:

1. Foundations of MEMS by Chang Liu (2nd edition), 2012

REFERENCES:
1. Tai-Ran Hsu , ―MEMS and Microsystems‖ (2nd edition), 2008.

2. Stephen Senturia, ― Microsystem‖ , Springer, 2014.
3. GaberielM.Rebiz, ―RF MEMS Theory,Design and Technology‖, John Wiley & Sons,2003.

4. CharlesP.Poole, Frank J.Owens, ―Introduction to nanotechnology‖ , John Wiley & sons,
2003.
5. Julian W.Gardner, Vijay K Varadhan, ―Microsensors, MEMS and Smart devices‖, John

Wiley & sons, 2001.

Curriculum and Syllabus | Open Electives | R 2017 | REC Page 63